Fringe projection technique has been a powerful tool for 3D metrology and surface profilometry with high repeatability. However, for in-situ measurement of objects with h[...]

Optical profilometers, such as scanning white light interferometers and confocal microscopes, provide high resolution measurements and are widely utilized in many fields [...]

Mid-spatial frequency on freeform optical elements induces small-angle scatter and affects the optical performance. Fabrication techniques involved in making freeform sur[...]

GELAREH BABAIE. Dynamic range enhancement in digital fringe projection and laser interferometry. (Under the direction of DR. FARAMARZ FARAHI)Optical metrology is the sci[...]

In the field of optical metrology, there are many existing techniques for measurement of the surface profile or film thickness of a sample of interest. However, many of [...]

Traditional optical instrumentation typically requires a controlled, stable environment, and this limits systems to a laboratory setting. For in-situ metrology applicatio[...]

Deflectometry has been introduced as a viable alternative to interferometric measurement of specular freeform optical surfaces. Deflectometry measurements show high repea[...]

Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity a[...]