The major trends in manufacturing are miniaturization, convergence of the traditional research fields and creation of interdisciplinary research areas. These trends have[...]

Coordinate Measuring Machines (CMMs) can be used to measure a great variety of parts. Essentially, any three-dimensional surface can be evaluated. Characterizing the mea[...]

Metrology is the science of measurement and deals with measuring different physical aspects of objects. In this research the focus has been on two basic problems that met[...]

Quantitative phase microscopy (QPM) allows for the imaging of translucent or transparent biological specimens without the need for exogenous contrast agents. This techniq[...]

Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity a[...]

Planar photonic crystals and other microstructured surfaces have important applications in a number of emerging technologies. However, these structures can be difficult [...]

The Plasmonic Nanolithography Machine (PLM) is a prototype that adopts near field maskless plasmonic nanolithography to achieve 45 nm line widths at 45 nm half pitch. A p[...]

The motivation for development of a multi-probe scanning microscope, presented in this dissertation, is to provide a versatile measurement tool mainly targeted for biolog[...]