Search results
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Title
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ABSOLUTE DISTANCE (THICKNESS) METROLOGY USING WAVELENGTH SCANNING INTERFEROMETRY
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Author
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Suratkar, Amit
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Date Created
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2009
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Subjects--Topical
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Optics, Optical engineering, Metrology
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Description
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Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity area (flatness), and the optical homogeneity within a transparent cavity; with...