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Title: ABSOLUTE DISTANCE (THICKNESS) METROLOGY USING WAVELENGTH SCANNING INTERFEROMETRY
Author: Suratkar, Amit
Date Created: 2009
Subjects--Topical: Optics, Optical engineering, Metrology
Description: Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity area (flatness), and the optical homogeneity within a transparent cavity; with...

Title: Absolute Surface Reconstruction by Slope Metrology and Photogrammetry
Author: Dong, Yue
Date Created: 2014
Subjects--Topical: Optics
Description: Developing the manufacture of aspheric and freeform optical elements requires an advanced metrology method which is capable of inspecting these elements with arbitrary freeform surfaces. In this dissertation, a new surface measurement scheme is in...

Title: Calibrating slope-dependent errors in profilometry
Author: Zhou, Yue
Date Created: 2014
Subjects--Topical: Mechanical engineering, Optics
Description: Optical profilometers, such as scanning white light interferometers and confocal microscopes, provide high resolution measurements and are widely utilized in many fields for measuring surface topography. The techniques are capable of high-speed su...

Title: FREEFORM MEASUREMENT WITH STITCHING TALBOT INTERFEROMETER
Author: Furukawa, Yasunori
Date Created: 2018
Subjects--Topical: Optics
Description: Freeform optics are being used in many fields to realize the outstanding performance due to their high degree of freedom. To realize sufficiently high performance, it is necessary to manufacture the freeform surface with high accuracy, which requi...

Title: INTERFEROMETRIC TECHNIQUE FOR MICROSTRUCTURE METROLOGY USING AN INDEX MATCHING LIQUID
Author: Purcell, Daryl
Date Created: 2010
Subjects--Topical: Optics
Description: Non-null interferometry offers a viable alternative to traditional interferometric testing of aspheric micro-lenses since computer generated holograms or null optics whose fabrication and testing are very expensive, are not required. However, due ...

Title: MID-SPATIAL FREQUENCY CHARACTERIZATION AND SPECIFICATION FOR FREEFORM SURFACES USING ZERNIKE POLYNOMIALS
Author: Hosseinimakarem, Zahra
Date Created: 2017
Subjects--Topical: Optics, Engineering
Description: Mid-spatial frequency on freeform optical elements induces small-angle scatter and affects the optical performance. Fabrication techniques involved in making freeform surfaces leave tooling marks on the surface due to the sub-aperture nature of th...

Title: Optical surface characterization with the structure function
Author: He, Liangyu
Date Created: 2013
Subjects--Topical: Mechanical engineering, Optics
Description: It is important to characterize surface and transmitted wavefront errors in terms of the spatial content. The errors are typically analyzed in three spatial domains: figure, ripple (or mid-spatial frequency) and roughness. These errors can affect ...