Search results
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Title
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ABSOLUTE DISTANCE (THICKNESS) METROLOGY USING WAVELENGTH SCANNING INTERFEROMETRY
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Author
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Suratkar, Amit
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Date Created
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2009
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Subjects--Topical
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Optics, Optical engineering, Metrology
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Description
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Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity area (flatness), and the optical homogeneity within a transparent cavity; with...
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Title
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DEVELOPMENT OF A VERSATILE HIGH SPEED NANOMETER LEVEL SCANNING MULTI-PROBE MICROSCOPE
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Author
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Lin, Feilong
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Date Created
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2011
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Subjects--Topical
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Mechanical engineering, Engineering
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Description
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The motivation for development of a multi-probe scanning microscope, presented in this dissertation, is to provide a versatile measurement tool mainly targeted for biological studies, especially on the mechanical and structural properties of an in...
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Title
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Effects of Edge Roughness on Optical Scattering from Periodic Microstructures
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Author
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Bergner, Brent
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Date Created
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2009
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Subjects--Topical
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Optics, Nanotechnology
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Description
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Planar photonic crystals and other microstructured surfaces have important applications in a number of emerging technologies. However, these structures can be difficult to fabricate in a consistent manner. Rapid, precise measurements of critical p...