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Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology
Title
Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology
Author
Arumugam, Kumar
Date Created
2021
Subjects--Topical
Mechanical engineering, Optics
Description
A unifying theme of this thesis is the implementation and characterization of point probes for surface metrology. The implementations include two optical non-contact profiling methods; fiber-based Fabry-Perot interferometry, and confocal microscop...
PRECISION POLISHING DYNAMICS: THE INFLUENCE OF PROCESS VIBRATIONS ON POLISHING RESULTS
Title
PRECISION POLISHING DYNAMICS: THE INFLUENCE OF PROCESS VIBRATIONS ON POLISHING RESULTS
Author
Mainuddin, Mohammad
Date Created
2014
Subjects--Topical
Mechanical engineering
Description
The optical pitch polishing process has been used over 300 years to obtain high quality optical surface finish with little subsurface damage. A pitch tool consists of a metal platen coated with a layer of polishing pitch whereby pitch is a highly ...