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Title: ABSOLUTE DISTANCE (THICKNESS) METROLOGY USING WAVELENGTH SCANNING INTERFEROMETRY
Author: Suratkar, Amit
Date Created: 2009
Subjects--Topical: Optics, Optical engineering, Metrology
Description: Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity area (flatness), and the optical homogeneity within a transparent cavity; with...

Title: Calibrating slope-dependent errors in profilometry
Author: Zhou, Yue
Date Created: 2014
Subjects--Topical: Mechanical engineering, Optics
Description: Optical profilometers, such as scanning white light interferometers and confocal microscopes, provide high resolution measurements and are widely utilized in many fields for measuring surface topography. The techniques are capable of high-speed su...

Title: IN-SITU MEASUREMENT OF DIMENSIONS AND SURFACE PROFILE OF AXISYMMETRIC OBJECTS USING FRINGE PROJECTION TECHNIQUE
Author: Farahi, Navid
Date Created: 2018
Subjects--Topical: Optics, Physics
Description: Fringe projection technique has been a powerful tool for 3D metrology and surface profilometry with high repeatability. However, for in-situ measurement of objects with highly specular surfaces, large dimensions, and large varying slopes, acquirin...

Title: THE FRACTIONAL BISPECTRUM NOISE REDUCTION TECHNIQUE AND APPLICATIONS IN INTERFEROMETRY
Author: Babaie, Jonathan
Date Created: 2019
Subjects--Topical: Optics
Description: In the field of optical metrology, there are many existing techniques for measurement of the surface profile or film thickness of a sample of interest. However, many of these common techniques break down when there exists a high level of noise in ...