Search results
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Title
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Evaluation of curved surfaces with x-ray reflectometry
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Author
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Cole, Jacob
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Date Created
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2022
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Subjects--Topical
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Mechanical engineering, Physics
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Description
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This dissertation presents a body of work developing novel models and methods for surface evaluation with X-ray reflectometry (XRR). At the time of this work, XRR is a highly used tool for the measurement of flat wafers and laminated semiconductor...