Search results
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Title
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PLASMONIC NANOLITHOGRAPHY MACHINE (PLM)
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Author
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Saad, Mohamed
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Date Created
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2013
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Subjects--Topical
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Mechanical engineering
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Description
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The Plasmonic Nanolithography Machine (PLM) is a prototype that adopts near field maskless plasmonic nanolithography to achieve 45 nm line widths at 45 nm half pitch. A plasmonic lens floating on a hydrodynamic air bearing rides on a disc with abo...