DEVELOPMENT OF EXPERIMENTAL FACILITIES FOR INVESTIGATIONS OF VORTEX MACHINING

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Howard, S. (2014). DEVELOPMENT OF EXPERIMENTAL FACILITIES FOR INVESTIGATIONS OF VORTEX MACHINING. Unc Charlotte Electronic Theses And Dissertations.
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Abstract

This dissertation presents work done in investigation of a novel polishing process called Vortex Machining. Vortex Machining uses an oscillating probe to induce vortices in a polishing slurry above a workpiece, thereby removing material in regions measuring micrometers laterally. The probe features a high-aspect ratio geometry that enables it to reach into (and potentially polish) complex geometries such as small holes and deep channels. The probe can also be used for force and displacement feedback, providing potential for in situ measurement. Throughout this research two test facilities have been developed; a low-power facility utilizing a 7 μm diameter probe oscillating at 32.7 kHz with amplitudes in the tens of micrometers, and a high-power facility utilizing a 500 μm diameter probe oscillating at several kHz with amplitudes of several hundred micrometers. The facilities control probe position to 0.5 μm, slurry depth to 10 μm, and probe phase to 2.5°; and have demonstrated machining capabilities used in preliminary studies of the process. Analysis software was developed to characterize process footprints. While substantial variability in footprints is observed, material removal rates of the order 10-8 and 10-4 mm3*hr-1 have been measured on silicon. Surface finish values of footprints are typically sub-nanometer and thus comparable to traditional polishing.

Details
Author

Howard, Stephen

Title

DEVELOPMENT OF EXPERIMENTAL FACILITIES FOR INVESTIGATIONS OF VORTEX MACHINING

Physical Description

1 online resource (247 pages) : PDF

Date

2014

Degree Granting Institution

University of North Carolina at Charlotte

Abstract

This dissertation presents work done in investigation of a novel polishing process called Vortex Machining. Vortex Machining uses an oscillating probe to induce vortices in a polishing slurry above a workpiece, thereby removing material in regions measuring micrometers laterally. The probe features a high-aspect ratio geometry that enables it to reach into (and potentially polish) complex geometries such as small holes and deep channels. The probe can also be used for force and displacement feedback, providing potential for in situ measurement. Throughout this research two test facilities have been developed; a low-power facility utilizing a 7 μm diameter probe oscillating at 32.7 kHz with amplitudes in the tens of micrometers, and a high-power facility utilizing a 500 μm diameter probe oscillating at several kHz with amplitudes of several hundred micrometers. The facilities control probe position to 0.5 μm, slurry depth to 10 μm, and probe phase to 2.5°; and have demonstrated machining capabilities used in preliminary studies of the process. Analysis software was developed to characterize process footprints. While substantial variability in footprints is observed, material removal rates of the order 10-8 and 10-4 mm3*hr-1 have been measured on silicon. Surface finish values of footprints are typically sub-nanometer and thus comparable to traditional polishing.

Genre

doctoral dissertations

Subjects--Topics

Mechanical engineering

Degree

Ph.D.

Keywords

EEM
Elastic Emission Machining
Low Roughness
Polishing
Subaperture
Tuning Fork

Subject Area

Mechanical Engineering

Advisor(s)

Smith, Stuart
Mullany, Brigid

Committee Members

Farahi, Faramarz
Keanini, Russell
Lucas, Thomas

Degree Note

Thesis (Ph.D.)--University of North Carolina at Charlotte, 2014.

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Rights Holder Information

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Identifier

Howard_uncc_0694D_10573

Permalink

http://hdl.handle.net/20.500.13093/etd:726